Fabrication error analysis on dual-mass silicon micro-gyroscope

Author

Huang, Libin ; Ni, Yunfang ; Yin, Yong

Author_Institution

Key Lab. of Micro-Inertial Instrum. & Adv. Navig. Technol. of Minist. of Educ., Southeast Univ., Nanjing, China

fYear

2011

fDate

16-18 Sept. 2011

Firstpage

3931

Lastpage

3934

Abstract

Limited by the current MEMS fabrication technology, full symmetry of the left and right parts of a dual-mass silicon micro-gyroscope is not achievable. Based on the characteristics of the dual-mass structure, a two degree-of-freedom viscous damping vibration system model was established for the micro gyroscope. Harmonic response analysis of the vibration system was implemented then, based on which drive-mode mismatch introduced by fabrication error and the resultant measurement error were analyzed. Finite element software ANSYS was employed to obtain the harmonic response of the actual micro gyroscope structure, with which correctness of the theoretical analysis was verified. The analysis is of significant importance for mechanical and circuit design of a dual-mass silicon micro gyroscope.

Keywords

damping; elemental semiconductors; finite element analysis; gyroscopes; micromechanical devices; silicon; vibrations; ANSYS; MEMS fabrication technology; Si; drive mode mismatch; dual mass microgyroscope; fabrication error analysis; finite element analysis; full symmetry; harmonic response analysis; viscous damping vibration system model; Fabrication; Finite element methods; Gyroscopes; Harmonic analysis; Sensors; Silicon; Vibrations; 2-DOF vibration system; MEMS; fabrication error; silicon micro-gyroscope;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrical and Control Engineering (ICECE), 2011 International Conference on

Conference_Location

Yichang

Print_ISBN

978-1-4244-8162-0

Type

conf

DOI

10.1109/ICECENG.2011.6057888

Filename

6057888