Title :
Fabrication error analysis on dual-mass silicon micro-gyroscope
Author :
Huang, Libin ; Ni, Yunfang ; Yin, Yong
Author_Institution :
Key Lab. of Micro-Inertial Instrum. & Adv. Navig. Technol. of Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
Limited by the current MEMS fabrication technology, full symmetry of the left and right parts of a dual-mass silicon micro-gyroscope is not achievable. Based on the characteristics of the dual-mass structure, a two degree-of-freedom viscous damping vibration system model was established for the micro gyroscope. Harmonic response analysis of the vibration system was implemented then, based on which drive-mode mismatch introduced by fabrication error and the resultant measurement error were analyzed. Finite element software ANSYS was employed to obtain the harmonic response of the actual micro gyroscope structure, with which correctness of the theoretical analysis was verified. The analysis is of significant importance for mechanical and circuit design of a dual-mass silicon micro gyroscope.
Keywords :
damping; elemental semiconductors; finite element analysis; gyroscopes; micromechanical devices; silicon; vibrations; ANSYS; MEMS fabrication technology; Si; drive mode mismatch; dual mass microgyroscope; fabrication error analysis; finite element analysis; full symmetry; harmonic response analysis; viscous damping vibration system model; Fabrication; Finite element methods; Gyroscopes; Harmonic analysis; Sensors; Silicon; Vibrations; 2-DOF vibration system; MEMS; fabrication error; silicon micro-gyroscope;
Conference_Titel :
Electrical and Control Engineering (ICECE), 2011 International Conference on
Conference_Location :
Yichang
Print_ISBN :
978-1-4244-8162-0
DOI :
10.1109/ICECENG.2011.6057888
