Real-time air refractive index compensation of laser interferometer system for step gauge calibration with CMM technique

Author

Vacharanukul, Ketsaya ; Sudatham, Wiroj ; Tonmueanwai, Anusorn

Author_Institution

Nat. Inst. of Metrol. (Thailand), Pathumthani, Thailand

fYear

2011

fDate

Aug. 28 2011-Sept. 1 2011

Firstpage

1978

Lastpage

1980

Abstract

A step gauge is a measurement standard that is used to verify a Coordinate Measuring Machine (CMM). The better the calibration system for the step gauge is, the greater the CMM verification can be. To achieve good step gauge calibration results, step gauge interferometry calibrator has been developed using a four-path laser interferometer system with the implementation of the real-time air refractive index compensation system. The system achieves the measurement uncertainty of 0.7 μm (1=2) at the length of 1 m.

Keywords

calibration; coordinate measuring machines; light interferometers; measurement by laser beam; measurement standards; measurement uncertainty; refractive index; refractive index measurement; CMM verification; calibration system; coordinate measuring machine; four-path laser interferometer system; measurement standard; measurement uncertainty; real-time air refractive index compensation; step gauge calibration; step gauge interferometry calibrator; Calibration; Coordinate measuring machines; Equations; Mathematical model; Measurement by laser beam; Real time systems; Refractive index;

fLanguage

English

Publisher

ieee

Conference_Titel

Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011

Conference_Location

Sydney, NSW

Print_ISBN

978-1-4577-1939-4

Type

conf

DOI

10.1109/IQEC-CLEO.2011.6193993

Filename

6193993