Spectral interferometer using sinusoidal phase modulation and back-propagation method

Author

Choi, S. ; Otsuki, K. ; Sasaki, O. ; Suzuki, T.

Author_Institution

Dept. of Electr. & Electron. Eng., Niigata Univ., Niigata, Japan

fYear

2011

fDate

Aug. 28 2011-Sept. 1 2011

Firstpage

325

Lastpage

326

Abstract

The multi-wavelength back-propagation (MWB) method has been developed for measuring positions of multiple reflecting surfaces longer than the optical wavelength. In this study, we demonstrate one dimensional profile measurement of a glass film by a sinusoidal phase modulating (SPM) spectral interferometer with MWB method. Displacements of front and rare surfaces of the glass film vibrating with 9.7 Hz are exactly measured. The measurement repeatability obtained from 9 repeatedly-measured results is 4.7 nm in a standard deviation.

Keywords

backpropagation; displacement measurement; light interferometers; optical films; optical glass; optical modulation; phase modulation; position measurement; MWB method; dimensional profile measurement; front surfaces; glass film; measurement repeatability; multiple reflecting surfaces; multiwavelength backpropagation method; optical wavelength; position measurement; rare surfaces; sinusoidal phase modulation; spectral interferometer; standard deviation; Optical films; Optical imaging; Optical interferometry; Optical reflection; Optical surface waves; Optical variables measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011

Conference_Location

Sydney, NSW

Print_ISBN

978-1-4577-1939-4

Type

conf

DOI

10.1109/IQEC-CLEO.2011.6194003

Filename

6194003