DocumentCode
1991565
Title
Widely electro thermal tunable bulk-micromachined MEMS-VCSEL operating around 850nm
Author
Davani, Hooman A. ; Grasse, Christian ; Kögel, Benjamin ; Gierl, Christian ; Zogal, Karolina ; Grundl, T. ; Westbergh, Petter ; Jatta, Sandro ; Böhm, Gerhard ; Meissner, Peter ; Larsson, Anders ; Amann, Markus-Christian
Author_Institution
Dept. of Microwaves & Opt., Tech. Univ. Darmstadt, Darmstadt, Germany
fYear
2011
fDate
Aug. 28 2011-Sept. 1 2011
Firstpage
32
Lastpage
34
Abstract
We present a tunable MEMS-VCSEL operating around 850 nm wavelength with the highest reported continuous tuning range of 37 nm achieved with semiconductor DBRs. The electro thermal tuning speed of the device reaches 700 Hz.
Keywords
distributed Bragg reflectors; laser tuning; micromachining; surface emitting lasers; distributed Bragg reflectors; electrothermal tunable bulk micromachined MEMS-VCSEL; frequency 700 Hz; semiconductor DBR; tuning range; wavelength 850 nm; Bandwidth; Distributed Bragg reflectors; Frequency measurement; Gain; Tuning; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location
Sydney, NSW
Print_ISBN
978-1-4577-1939-4
Type
conf
DOI
10.1109/IQEC-CLEO.2011.6194011
Filename
6194011
Link To Document