Title :
A novel equivalent circuit model for CMUTs
Author :
Oguz, H. Kagan ; Olcum, Selim ; Senlik, Muhammed N. ; Atalar, Abdullah ; Köymen, Hayrettin
Author_Institution :
Dept. of Electr. & Electron. Eng., Bilkent Univ., Ankara, Turkey
Abstract :
A nonlinear equivalent circuit for immersed transmitting capacitive micromachined ultrasonic transducers (CMUTs) is presented. The velocity profile across the CMUT surface maintains the same form over a wide frequency range. This property and the profile are used to model both the electromechanical conversion and the mechanical section. The model parameters are calculated considering the root mean square of the velocity distribution on the membrane surface as the through variable. The new model is compared with the FEM simulation results. The new model predicts the CMUT performance very accurately.
Keywords :
capacitive sensors; equivalent circuits; nonlinear network analysis; ultrasonic transducers; CMUT surface; FEM simulation; electromechanical conversion; equivalent circuit model; immersed transmitting capacitive micromachined ultrasonic transducers; mechanical section; membrane surface; nonlinear equivalent circuit; velocity distribution; velocity profile; Biomembranes; Capacitance; Equivalent circuits; Frequency; Harmonic analysis; Impedance; Maintenance engineering; Predictive models; Root mean square; Ultrasonic transducers; cmut; harmonic distortion; nonlinear model; root mean square velocity; velocity profile;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441435