A novel equivalent circuit model for CMUTs

Author

Oguz, H. Kagan ; Olcum, Selim ; Senlik, Muhammed N. ; Atalar, Abdullah ; Köymen, Hayrettin

Author_Institution

Dept. of Electr. & Electron. Eng., Bilkent Univ., Ankara, Turkey

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2193

Lastpage

2196

Abstract

A nonlinear equivalent circuit for immersed transmitting capacitive micromachined ultrasonic transducers (CMUTs) is presented. The velocity profile across the CMUT surface maintains the same form over a wide frequency range. This property and the profile are used to model both the electromechanical conversion and the mechanical section. The model parameters are calculated considering the root mean square of the velocity distribution on the membrane surface as the through variable. The new model is compared with the FEM simulation results. The new model predicts the CMUT performance very accurately.

Keywords

capacitive sensors; equivalent circuits; nonlinear network analysis; ultrasonic transducers; CMUT surface; FEM simulation; electromechanical conversion; equivalent circuit model; immersed transmitting capacitive micromachined ultrasonic transducers; mechanical section; membrane surface; nonlinear equivalent circuit; velocity distribution; velocity profile; Biomembranes; Capacitance; Equivalent circuits; Frequency; Harmonic analysis; Impedance; Maintenance engineering; Predictive models; Root mean square; Ultrasonic transducers; cmut; harmonic distortion; nonlinear model; root mean square velocity; velocity profile;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441435

Filename

5441435