Title :
Zero mass loading sensitivity of the S0 Lamb wave resonance in thin film plate acoustic resonators (FPARs)
Author_Institution :
Dept. Solid State Electron., Uppsala Univ., Uppsala, Sweden
Abstract :
Synchronously designed FPARs are typically operating at the upper edge of the frequency stopband due to the negative reflection coefficient of the lowest order symmetric Lamb wave (S0) in periodical strip gratings. In this study the possibility to achieve 0-sensitivity of the upper stopband edge with respect to electrode thickness tolerances is discussed for AlN based FPARs employing Al strip reflectors. 0-sensitive topologies are identified through FEM COMSOL experiments.
Keywords :
acoustic resonance; acoustic resonators; aluminium compounds; finite element analysis; surface acoustic waves; 0-sensitive topologies; Al strip reflectors; AlN; AlN based FPAR; FEM COMSOL experiments; S0 Lamb wave resonance; electrode thickness tolerances; frequency stopband; lowest order symmetric Lamb wave; negative reflection coefficient; periodical strip gratings; thin film plate acoustic resonators; zero mass loading sensitivity; Acoustic reflection; Acoustic waves; Aluminum; Biomembranes; Electrodes; Frequency; Gratings; Resonance; Strips; Transistors; AlN; Lamb wave; Resonator; Stopband; Technological tolerance;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441452
