Title :
Selective gold film removal from multilayer substrates
Author :
Ware, Hayley ; MacMillan, Fraser ; Meladze, Malkhaz ; Rohde, Charles A. ; Simpson, M. Cather
Author_Institution :
Photon Factory, Univ. of Auckland, Auckland, New Zealand
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
Pulsed UV laser ablation is used to remove a thin (250nm) gold film from one side of a 130μm thick quartz substrate. This is done without removing the gold film deposited on the bottom of the quartz plate. An excimer laser is used to remove the gold film with single pulse ablation. We further analyze the effects of increasing pulse energies on the bottom film, and show the progression from pinhole formation to simultaneous removal of both gold films as function of pulse overlap.
Keywords :
excimer lasers; gold; laser ablation; optical multilayers; quartz; substrates; excimer laser; multilayer substrates; pinhole formation; pulse energy; pulse overlap; pulsed ultraviolet laser ablation; selective gold film removal; single pulse ablation; size 130 mum; wavelength 250 nm; Gold; Laser ablation; Optical attenuators; Optical films; Optical pulses; Substrates;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6194086
