DocumentCode
1993146
Title
Selective gold film removal from multilayer substrates
Author
Ware, Hayley ; MacMillan, Fraser ; Meladze, Malkhaz ; Rohde, Charles A. ; Simpson, M. Cather
Author_Institution
Photon Factory, Univ. of Auckland, Auckland, New Zealand
fYear
2011
fDate
Aug. 28 2011-Sept. 1 2011
Firstpage
1998
Lastpage
2000
Abstract
Pulsed UV laser ablation is used to remove a thin (250nm) gold film from one side of a 130μm thick quartz substrate. This is done without removing the gold film deposited on the bottom of the quartz plate. An excimer laser is used to remove the gold film with single pulse ablation. We further analyze the effects of increasing pulse energies on the bottom film, and show the progression from pinhole formation to simultaneous removal of both gold films as function of pulse overlap.
Keywords
excimer lasers; gold; laser ablation; optical multilayers; quartz; substrates; excimer laser; multilayer substrates; pinhole formation; pulse energy; pulse overlap; pulsed ultraviolet laser ablation; selective gold film removal; single pulse ablation; size 130 mum; wavelength 250 nm; Gold; Laser ablation; Optical attenuators; Optical films; Optical pulses; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location
Sydney, NSW
Print_ISBN
978-1-4577-1939-4
Type
conf
DOI
10.1109/IQEC-CLEO.2011.6194086
Filename
6194086
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