• DocumentCode
    1993524
  • Title

    Acoustic mode behavior in Lateral Field Excited sensors

  • Author

    McGann, Jason M. ; Sgambato, Kristopher ; McCann, Donald F. ; Vetelino, John F. ; Peters, Christian

  • Author_Institution
    Lab. for Surface Sci. & Technol., Univ. of Maine, Orono, ME, USA
  • fYear
    2009
  • fDate
    20-23 Sept. 2009
  • Firstpage
    645
  • Lastpage
    648
  • Abstract
    Lateral Field Excited (LFE) sensors have been shown to have several very attractive features, the most important of which is a bare sensing surface. In contrast to the standard Quartz Crystal Monitor (QCM), the LFE sensor surface allows one to sensitively monitor both mechanical and electrical property changes in adjacent media or analyte selective biological or chemical films. Although LFE sensors have been shown to function very efficiently in liquid media, LFE sensor operation in gaseous environments has been plagued by spurious mode responses. It is the purpose of this work to study electrode dimensions, sensor curvature, and surface etching in order to minimize the spurious mode behavior found in LFE Quartz and Lithium Tantalate (LTO) gas sensors.
  • Keywords
    bulk acoustic wave devices; elastic waves; gas sensors; lithium compounds; piezoelectric devices; piezoelectric materials; silicon compounds; LFE lithium tantalate gas sensors; LFE quartz gas sensors; LFE sensors; LiTaO3; SiO2; acoustic mode behavior; analyte selective biological films; analyte selective chemical films; bare sensing surface; electrical property changes; electrode dimensions; gaseous environment LFE sensor operation; lateral field excited sensors; mechanical property changes; sensor curvature; spurious mode responses; surface etching; Acoustic sensors; Biochemical analysis; Biosensors; Chemical analysis; Chemical and biological sensors; Gas detectors; Mechanical factors; Mechanical sensors; Monitoring; Sensor phenomena and characterization; bulk acoustic wave; latral field excitation; sensor;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium (IUS), 2009 IEEE International
  • Conference_Location
    Rome
  • ISSN
    1948-5719
  • Print_ISBN
    978-1-4244-4389-5
  • Electronic_ISBN
    1948-5719
  • Type

    conf

  • DOI
    10.1109/ULTSYM.2009.5441520
  • Filename
    5441520