Title :
Acoustic mode behavior in Lateral Field Excited sensors
Author :
McGann, Jason M. ; Sgambato, Kristopher ; McCann, Donald F. ; Vetelino, John F. ; Peters, Christian
Author_Institution :
Lab. for Surface Sci. & Technol., Univ. of Maine, Orono, ME, USA
Abstract :
Lateral Field Excited (LFE) sensors have been shown to have several very attractive features, the most important of which is a bare sensing surface. In contrast to the standard Quartz Crystal Monitor (QCM), the LFE sensor surface allows one to sensitively monitor both mechanical and electrical property changes in adjacent media or analyte selective biological or chemical films. Although LFE sensors have been shown to function very efficiently in liquid media, LFE sensor operation in gaseous environments has been plagued by spurious mode responses. It is the purpose of this work to study electrode dimensions, sensor curvature, and surface etching in order to minimize the spurious mode behavior found in LFE Quartz and Lithium Tantalate (LTO) gas sensors.
Keywords :
bulk acoustic wave devices; elastic waves; gas sensors; lithium compounds; piezoelectric devices; piezoelectric materials; silicon compounds; LFE lithium tantalate gas sensors; LFE quartz gas sensors; LFE sensors; LiTaO3; SiO2; acoustic mode behavior; analyte selective biological films; analyte selective chemical films; bare sensing surface; electrical property changes; electrode dimensions; gaseous environment LFE sensor operation; lateral field excited sensors; mechanical property changes; sensor curvature; spurious mode responses; surface etching; Acoustic sensors; Biochemical analysis; Biosensors; Chemical analysis; Chemical and biological sensors; Gas detectors; Mechanical factors; Mechanical sensors; Monitoring; Sensor phenomena and characterization; bulk acoustic wave; latral field excitation; sensor;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441520