DocumentCode
1993524
Title
Acoustic mode behavior in Lateral Field Excited sensors
Author
McGann, Jason M. ; Sgambato, Kristopher ; McCann, Donald F. ; Vetelino, John F. ; Peters, Christian
Author_Institution
Lab. for Surface Sci. & Technol., Univ. of Maine, Orono, ME, USA
fYear
2009
fDate
20-23 Sept. 2009
Firstpage
645
Lastpage
648
Abstract
Lateral Field Excited (LFE) sensors have been shown to have several very attractive features, the most important of which is a bare sensing surface. In contrast to the standard Quartz Crystal Monitor (QCM), the LFE sensor surface allows one to sensitively monitor both mechanical and electrical property changes in adjacent media or analyte selective biological or chemical films. Although LFE sensors have been shown to function very efficiently in liquid media, LFE sensor operation in gaseous environments has been plagued by spurious mode responses. It is the purpose of this work to study electrode dimensions, sensor curvature, and surface etching in order to minimize the spurious mode behavior found in LFE Quartz and Lithium Tantalate (LTO) gas sensors.
Keywords
bulk acoustic wave devices; elastic waves; gas sensors; lithium compounds; piezoelectric devices; piezoelectric materials; silicon compounds; LFE lithium tantalate gas sensors; LFE quartz gas sensors; LFE sensors; LiTaO3; SiO2; acoustic mode behavior; analyte selective biological films; analyte selective chemical films; bare sensing surface; electrical property changes; electrode dimensions; gaseous environment LFE sensor operation; lateral field excited sensors; mechanical property changes; sensor curvature; spurious mode responses; surface etching; Acoustic sensors; Biochemical analysis; Biosensors; Chemical analysis; Chemical and biological sensors; Gas detectors; Mechanical factors; Mechanical sensors; Monitoring; Sensor phenomena and characterization; bulk acoustic wave; latral field excitation; sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location
Rome
ISSN
1948-5719
Print_ISBN
978-1-4244-4389-5
Electronic_ISBN
1948-5719
Type
conf
DOI
10.1109/ULTSYM.2009.5441520
Filename
5441520
Link To Document