Title :
SAW OFC strain sensor
Author :
Roller, M. ; Malocha, D.C. ; Vaidyanathan, R.
Author_Institution :
Mech., Mater. & Aerosp. Eng. Dept., Univ. of Central Florida, Orlando, FL, USA
Abstract :
This paper presents results for a 250MHZ orthogonal frequency coded (OFC) surface acoustic wave (SAW) cantilever device on YZ LiNbO3. A 1-D model is presented which predicts the variation in the wave velocity with applied strain. A FEM analysis is conducted which verifies the strain on the cantilever and supports the 1-D model predictions. Predicted results from the FEM model are presented and are in good agreement with the measured SAW OFC cantilever delay line results. Initial results on a diaphragm micro-ablated cavity are also presented.
Keywords :
cantilevers; finite element analysis; lithium compounds; orthogonal codes; strain sensors; surface acoustic wave delay lines; surface acoustic wave sensors; 1D model; LiNbO3; SAW OFC strain sensor; delay line; finite element analysis; frequency 250 MHz; orthogonal frequency coded cantilever; surface acoustic wave cantilever; wave velocity; Capacitive sensors; Surface acoustic waves; Cantilever; OFC; SAW; Sensor; Strain;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441544
