Title :
Non-linear dynamic response of cMUTs population: modeling and characterization
Author :
Senegond, Nicolas ; Teston, Franck ; Patat, Frederic ; Certon, Dominique
Abstract :
This paper presents a time domain model for simulating cMUT in fluid. Non linearity is taking into account and the collapse / snapback phenomena are modeled with a ¿thrust¿ model. Confrontation with another simulation tool is performed and comparison with experimental results is done.
Keywords :
capacitive sensors; microsensors; time-domain analysis; ultrasonic transducers; cMUTs population; collapse/snapback phenomena; nonlinear dynamic response; thrust model; time domain model; Biomembranes; Difference equations; Electrostatics; Finite difference methods; Fluid dynamics; Linearity; Matrix converters; Pistons; Transducers; Voltage; Electroacoustic transducers; cMUT; fluid coupling; non linear modeling;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441558
