Title :
The Development and use of an Ate System for On-Wafer Microwave Characterisation of GaAs MMICs
Author :
Buck, B.J. ; Eddison, I.G.
Abstract :
The design and operation of a measurement system intended for the automatic, on-wafer r.f. characterisation of GaAs monolithic microwave integrated circuits is described. Results are presented for an entire 2 inch wafer of S-band GaAs ICS which have been measured at a rate of 3¿ minutes per chip.
Keywords :
Calibration; Gallium arsenide; Integrated circuit layout; MMICs; Microwave integrated circuits; Microwave measurements; Performance evaluation; Probes; Scattering parameters; Semiconductor device measurement;
Conference_Titel :
Microwave Conference, 1985. 15th European
Conference_Location :
Paris, France
DOI :
10.1109/EUMA.1985.333613
