• DocumentCode
    1994606
  • Title

    The Development and use of an Ate System for On-Wafer Microwave Characterisation of GaAs MMICs

  • Author

    Buck, B.J. ; Eddison, I.G.

  • fYear
    1985
  • fDate
    9-13 Sept. 1985
  • Firstpage
    1031
  • Lastpage
    1036
  • Abstract
    The design and operation of a measurement system intended for the automatic, on-wafer r.f. characterisation of GaAs monolithic microwave integrated circuits is described. Results are presented for an entire 2 inch wafer of S-band GaAs ICS which have been measured at a rate of 3¿ minutes per chip.
  • Keywords
    Calibration; Gallium arsenide; Integrated circuit layout; MMICs; Microwave integrated circuits; Microwave measurements; Performance evaluation; Probes; Scattering parameters; Semiconductor device measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 1985. 15th European
  • Conference_Location
    Paris, France
  • Type

    conf

  • DOI
    10.1109/EUMA.1985.333613
  • Filename
    4132301
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1994606