Title :
Imperfections in micro-optics characterised using focussed ion beam sectioning and imaging
Author :
Kane, D.M. ; Chater, R.J. ; McPhail, D.S.
Author_Institution :
Dept. of Phys. & Astron., Macquarie Univ., Sydney, NSW, Australia
fDate :
Aug. 28 2011-Sept. 1 2011
Abstract :
Focussed ion beam milling, combined with secondary ion and secondary electron imaging, is used to evaluate internal imperfections in glass microspheres. Flaws on the nano-scale and micro-scale are exposed. Glass aging can also be characterised.
Keywords :
ageing; electron beam applications; flaw detection; focused ion beam technology; micro-optics; milling; optical glass; optical testing; focussed ion beam imaging; focussed ion beam milling; focussed ion beam sectioning; glass aging; glass microsphere; microoptics imperfections; microscale flaws; nanoscale flaws; secondary electron imaging; secondary ion; Glass; Ion beams; Milling; Optical device fabrication; Optical imaging; Silicon compounds;
Conference_Titel :
Quantum Electronics Conference & Lasers and Electro-Optics (CLEO/IQEC/PACIFIC RIM), 2011
Conference_Location :
Sydney, NSW
Print_ISBN :
978-1-4577-1939-4
DOI :
10.1109/IQEC-CLEO.2011.6194151
