Dynamic response of water droplet coated silicon MEMS resonators

Author

Lin, Angel T -H ; Yan, Jize ; Seshia, Ashwin A.

Author_Institution

Dept. of Eng., Univ. of Cambridge, Cambridge, UK

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

669

Lastpage

672

Abstract

This paper studies the dynamic response of silicon bulk acoustic mode resonators spotted with water droplets of varying volume on the top surface. Three different cases were compared: (i) bare silicon resonators, (ii) parylene C coated resonators and (iii) hydrophobic self assembled monolayer coated resonators. Experimentally derived variations in quality factor are compared with those obtained analytically for the electrostatically driven square extensional mode resonator. The measured quality factors showed a good agreement with the models.

Keywords

acoustic resonators; dynamic response; microcavities; micromechanical resonators; monolayers; self-assembly; bare silicon resonators; dynamic response; electrostatically driven square extensional mode resonator; hydrophobic self assembled monolayer coated resonators; parylene C coated resonators; quality factor; silicon bulk acoustic mode resonators; water droplet coated silicon MEMS resonators; Coatings; Damping; Electrodes; Electrostatics; Micromechanical devices; Optical resonators; Optical surface waves; Q factor; Resonant frequency; Silicon; bulk acoustic wave resonator; damping; hydrophobic SAM; parylene;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441588

Filename

5441588