• DocumentCode
    1995589
  • Title

    Reflectance As A Thickness And Growth Rate Monitor For Chemical Vapor Deposition

  • Author

    Breiland, W.G. ; Killeen, K.P. ; Omstead, T.R.

  • Author_Institution
    Sandia National Laboratories
  • fYear
    1992
  • fDate
    16-19 Nov 1992
  • Firstpage
    11
  • Lastpage
    12
  • Keywords
    Chemical vapor deposition; Inductors; Microelectronics; Monitoring; Optical films; Performance evaluation; Reflectivity; Thickness measurement; Transistors; Vertical cavity surface emitting lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
  • Print_ISBN
    0-7803-0526-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1992.693819
  • Filename
    693819
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1995589