DocumentCode :
1995665
Title :
Highly localized optical diagnostics of thin film processing
Author :
Herman, Irving P.
Author_Institution :
Columbia University
fYear :
1992
fDate :
16-19 Nov. 1992
Firstpage :
15
Lastpage :
16
Keywords :
Copper; Etching; Gas lasers; Optical films; Probes; Raman scattering; Silicon; Surface emitting lasers; Surface morphology; Temperature;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-0526-4
Type :
conf
DOI :
10.1109/LEOS.1992.693821
Filename :
693821
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1995665
