DocumentCode :
1995785
Title :
In-situ Optical Diagnostics Of Semiconductor heterostructures
Author :
Richter, W. ; Zahn, D.R.T.
Author_Institution :
Technische Universitat Berlin
fYear :
1992
fDate :
16-19 Nov 1992
Firstpage :
19
Lastpage :
20
Keywords :
Gallium arsenide; Monitoring; Optical reflection; Optical scattering; Optical sensors; Raman scattering; Rough surfaces; Spectroscopy; Surface reconstruction; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
Type :
conf
DOI :
10.1109/LEOS.1992.693823
Filename :
693823
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1995785
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