• DocumentCode
    1995809
  • Title

    Characterization Of Semiconductor Wafers By Light Of Shorter Wavelength Than Their Band Gap

  • Author

    Ogawa, T. ; Nakajima, J. ; Taijing, Lu ; Toyoda, K. ; Nango, N. ; Abe, T. ; Kusama, T.

  • Author_Institution
    Gakushuin University
  • fYear
    1992
  • fDate
    16-19 Nov 1992
  • Firstpage
    21
  • Lastpage
    22
  • Keywords
    Infrared detectors; Light scattering; Lighting; Optical scattering; Optical surface waves; Photonic band gap; Rough surfaces; Surface roughness; Surface waves; Ultra large scale integration;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
  • Print_ISBN
    0-7803-0526-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1992.693824
  • Filename
    693824
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1995809