DocumentCode :
1995809
Title :
Characterization Of Semiconductor Wafers By Light Of Shorter Wavelength Than Their Band Gap
Author :
Ogawa, T. ; Nakajima, J. ; Taijing, Lu ; Toyoda, K. ; Nango, N. ; Abe, T. ; Kusama, T.
Author_Institution :
Gakushuin University
fYear :
1992
fDate :
16-19 Nov 1992
Firstpage :
21
Lastpage :
22
Keywords :
Infrared detectors; Light scattering; Lighting; Optical scattering; Optical surface waves; Photonic band gap; Rough surfaces; Surface roughness; Surface waves; Ultra large scale integration;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
Type :
conf
DOI :
10.1109/LEOS.1992.693824
Filename :
693824
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=1995809
