Title :
A hybrid substrate for a temperature-compensated surface acoustic wave filter
Author :
Hori, Yuji ; Kobayashi, Hiroki ; Tohyama, Kazutoshi ; Iwasaki, Yasunori ; Suzuki, Kenji
Author_Institution :
R&D Center, NGK Insulators, Ltd., Nagoya, Japan
Abstract :
A hybrid substrate that is appropriate for temperature compensation of a surface acoustic wave (SAW) filter is developed. A one-port SAW resonator was fabricated on the hybrid substrate to study its electronic characteristics and thermal stability. The spurious response originating from bulk wave reflection at the layer interface was found to be sufficiently small with a relatively thin piezoelectric layer. The minimum temperature coefficient of frequency (TCF) was -8.4 ppm/°C.
Keywords :
acoustic wave reflection; compensation; substrates; surface acoustic wave filters; surface acoustic wave resonators; thermal stability; SAW resonator; bulk wave reflection; electronic characteristics; hybrid substrate; layer interface; piezoelectric layer; temperature coefficient; temperature-compensated surface acoustic wave filter; thermal stability; Acoustic waves; Frequency; Resonator filters; SAW filters; Silicon; Surface acoustic waves; Temperature; Thermal conductivity; Thermal stresses; Wafer bonding; Hybrid substrate; SAW; Silicon; TCF; Temperature compensation;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441626
