Title :
A Now High-efficiency Vacuum Ultraviolet F2 Lamp Excited By A Microwave Discharge And Its Application In LSI Processing
Author :
Kumagai, Hiroshi ; Toyoda, Koichi
Author_Institution :
RIKEN, the Institute of Physical and Chemical Research
Keywords :
Etching; Fluorescence; Lamps; Light sources; Masers; Photochemistry; Photonics; Power lasers; Semiconductor films; Silicon;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.693845
