• DocumentCode
    1996240
  • Title

    A Now High-efficiency Vacuum Ultraviolet F2 Lamp Excited By A Microwave Discharge And Its Application In LSI Processing

  • Author

    Kumagai, Hiroshi ; Toyoda, Koichi

  • Author_Institution
    RIKEN, the Institute of Physical and Chemical Research
  • fYear
    1992
  • fDate
    16-19 Nov 1992
  • Firstpage
    62
  • Lastpage
    63
  • Keywords
    Etching; Fluorescence; Lamps; Light sources; Masers; Photochemistry; Photonics; Power lasers; Semiconductor films; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
  • Print_ISBN
    0-7803-0526-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1992.693845
  • Filename
    693845
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=1996240