Fabrication of GHz range oscillators stabilized by nano-carbon-diamond-based surface acoustic wave resonators

Author

Salut, Roland ; Ballandras, Sylvamn ; Assouar, Badreddine ; ElMazria, Omar ; Gesset, Céline ; Saada, Samuel ; Bergonzo, Philippe ; Bénédic, Fabien ; Omnes, Frank ; Yantchev, Ventsislav ; Kartadjiev, Ilia ; Edon, Vincent ; Rémiens, Denis

Author_Institution

FEMTO-ST, Besancon, France

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

927

Lastpage

930

Abstract

A lot of work has been dedicated to evaluate the interest of Diamond films for the development of high frequency surface acoustic wave (SAW) devices for various Radio- Frequency (RE) applications. The main interest of such a material consists in its very high acoustic phase velocities. In this work, different research groups are collaborating to identify the capability of diamond-based substrates to allow for the development of SAW resonators at 5 GHz and above, to stabilize RE oscillators in that frequency range. Nano-crystalline diamond (NCD) particularly is investigated in that matter, coupled with various piezoelectric layers. Design of single and double port SAW resonators operating near 5 GHz: are reported, as well as experimental results for SAW resonators built atop the considered material combinations These results allows for identifying the best configuration for the development of high frequency sources.

Keywords

diamond; nanofabrication; nanostructured materials; radiofrequency oscillators; surface acoustic wave resonators; C; GHz range oscillator fabrication; NCD; SAW resonators; diamond films; diamond-based substrates; frequency 5 GHz; high acoustic phase velocities; high frequency SAW devices; nanocarbon-diamond-based surface acoustic wave resonators; nanocrystalline diamond; piezoelectric layers; Acoustic devices; Acoustic materials; Acoustic waves; Collaborative work; Fabrication; Frequency; Oscillators; Radiofrequency identification; Surface acoustic wave devices; Surface acoustic waves; Diamond; E-beam; SAW; omponent; resonator; waveguide;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441638

Filename

5441638