Title :
Silicon-on-insulator (SOI) integration for organic field effect transistor (OFET) based circuits
Author :
Ozgun, Recep ; Jung, Byung J. ; Dhar, Bal M. ; Katz, Howard E. ; Andreou, A.G.
Author_Institution :
Electr. & Comput. Eng., Johns Hopkins Univ., Baltimore, MD, USA
Abstract :
In this paper, we report the first silicon-on-insulator (SOI) integration technique for organic field effect transistor (OFET) based circuits. Proposed design flow relies on only basic micro-fabrication processes such as photolithography and physical vapor deposition. This novel fabrication technique allows patterning of conductive silicon gate islands on the subtrate and eases the via and interconnect patterning and deposition for a bottom-gate OFET configuration. We fabricated pand n-type transistors, and proof of concept OFET-based complementary circuits such as inverter and NAND-gate. Fabricated CMOS inverters have full rail-to-rail swing, very high gain (up to 58.3 at 60V, and 18.1 at 20V supply voltages), and outstanding noise margins of around 21V symmetric for NMhigh and NMlow at 60V supply voltage.
Keywords :
logic gates; organic field effect transistors; photolithography; silicon-on-insulator; CMOS inverters; NAND gate; microfabrication processes; organic field effect transistor; photolithography; physical vapor deposition; rail to rail swing; silicon on insulator; voltage 60 V; Dielectrics; Integrated circuit interconnections; Inverters; Logic gates; Materials; Metals; Transistors;
Conference_Titel :
Circuits and Systems (ISCAS), 2011 IEEE International Symposium on
Conference_Location :
Rio de Janeiro
Print_ISBN :
978-1-4244-9473-6
Electronic_ISBN :
0271-4302
DOI :
10.1109/ISCAS.2011.5938050