Unified model for Bulk Acoustic Wave resonators´ nonlinear effects

We present a nonlinear model for Bulk Acoustic Wave resonators that combines different sources of nonlinearity by use of device-independent material-specific parameters to predict intermodulation and harmonic generation. The model accounts for intrinsic nonlinearities due to the stiffened elasticity and thermal effects that arise from temperature changes in a sample driven by an amplitude-modulated signal. Nonlinear parameters of the aluminum nitride piezoelectric layer have been extracted that are in agreement with previously published results.