Title :
The 200 W power high-stability KrF excimer laser
Author :
Hoshino, H. ; Kodama, Y. ; Takahashi, K. ; Sugimoto, Y. ; Abe, T. ; Sajiki, K. ; Nire, T.
Author_Institution :
Res. Div., Komatsu Ltd., Kanagawa, Japan
Abstract :
We have developed a 200 W (1 J @ 200 Hz) KrF excimer laser which achieved energy stability under 6% (peak to peak for 1000 shots) for over 100 hours.
Keywords :
excimer lasers; krypton compounds; laser stability; 200 W; KrF; corona discharge preionization system; excimer laser; gate turn-on thyristor; high energy stability; high power laser; high repetition rate operation; high throughput production; high yield; industrial lasers; jitter; laser controller; Jitter; Laser stability; Optical control; Optical pulses; Power lasers; Pulse amplifiers; Pulse measurements; Pulsed laser deposition; Thyristors; Voltage control;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.970808
