Title :
High Sensitivity Optical Detection Of Internal Strain Of Semiconductor Materials Using Polarized Light
Author :
Horinaka, Hiromichi ; Yamamoto, Naoji ; Cho, Yoshio
Author_Institution :
University of Osaka Prefecture
Keywords :
Capacitive sensors; Charge carrier processes; Electron emission; Gallium arsenide; Optical detectors; Optical devices; Optical polarization; Optical sensors; Semiconductor materials; Virtual colonoscopy;
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
DOI :
10.1109/LEOS.1992.693876