DocumentCode
1999059
Title
X-ray Investigation Of Multilayered Semiconductor Heterostructures
Author
Tapfer, Leander
Author_Institution
Centro Nazionale Ricerca e Sviluppo Material
fYear
1992
fDate
16-19 Nov 1992
Firstpage
131
Lastpage
132
Keywords
Capacitive sensors; Chemicals; Epitaxial layers; Lattices; Optical superlattices; Satellites; Semiconductor materials; Structural engineering; Substrates; X-ray diffraction;
fLanguage
English
Publisher
ieee
Conference_Titel
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN
0-7803-0526-4
Type
conf
DOI
10.1109/LEOS.1992.693877
Filename
693877
Link To Document