Suppression of transverse waveguide modes for SAW resonators with Pt and Pt/Rh/ZrO2 electrodes

Author

Meulendyk, B.J. ; da Cunha, M. Pereira

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Maine, Orono, ME, USA

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2810

Lastpage

2813

Abstract

In this work, spurious transverse waveguide modes were suppressed from the frequency responses of Pt-electrode resonators on ST-X quartz [0Â°, 132.75Â°, 0Â°] and Pt- and Pt/Rh/ZrO₂-electrode resonators on LGS [0Â°, 144Â°, 24Â°] through the design of the gratings, aperture, and transducers´ active area. In particular, it will be shown that conventional shorted gratings cannot be used with Pt or Pt/Rh/ZrO₂ electrodes, since the velocity discontinuity between the grating and the bus bar leaks energy from the active area. Scalar potential theory is utilized to adjust the ratio of a transducer´s active area to the total aperture, such that higher-order transverse waveguide resonances are filtered from the frequency response.

Keywords

acoustic transducers; acoustic waveguides; electrodes; frequency response; platinum; rhodium; surface acoustic wave resonators; zirconium compounds; Pt-Rh-ZrO₂; SAW resonator; aperture design; electrode resonator; frequency response; grating design; scalar potential theory; transducer active area design; transverse waveguide mode suppression; velocity discontinuity; Apertures; Electrodes; Gratings; Insertion loss; Resonance; Resonator filters; Surface acoustic waves; Transducers; Virtual manufacturing; Waveguide theory; LGS; Pt electrodes; Pt/Rh/ZrO2 electodes; quartz; transverse waveguide mode suppression;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441767

Filename

5441767