Title :
Sol-gel derived PMN-PT thick film for high frequency ultrasound transducer applications
Author :
Zhu, B.P. ; Zhou, Q.F. ; Shung, K.K. ; Wei, Q. ; Huang, Y.H.
Author_Institution :
Dept. of Biomed. Eng., Univ. of Southern California, Los Angeles, CA, USA
Abstract :
Piezoelectric 0.65Pb(Mg1/3Nb2/3)O3-0.35PbTiO3 thick film with the thickness around 12 ¿m has been deposited on the platinum bufered Si substrate via a composite spin-coating method. The X-ray diffraction analysis and scanning electron microscopy revealed that the film was in the well-crystallized perovskite phase and crack-free. The separation of films from the substrate was achieved using a wet chemical method. The lifted-off film exhibited good dielectric and ferroelectric properties. At 1 kHz, the dielectric constant and the loss were 3326 and 0.037, respectively, while the remnant polarization was 30.0 ¿C/cm2. A high frequency single element acoustic transducer fabricated with this film showed a bandwidth at -6 dB of 63.6% at 110 MHz.
Keywords :
X-ray diffraction; dielectric losses; dielectric polarisation; ferroelectricity; lead compounds; permittivity; piezoelectric thin films; scanning electron microscopy; sol-gel processing; spin coating; ultrasonic transducers; PMN-PT thick film; Pb(Mg0.33Nb0.67)O3-PbTiO3; X-ray diffraction analysis; composite spin-coating method; dielectric constant; dielectric loss; dielectric properties; ferroelectric properties; frequency 1 kHz; frequency 110 MHz; high frequency single element acoustic transducer; high frequency ultrasound transducer; lifted-off film; perovskite phase; piezoelectric thick film; platinum bufered Si substrate; remnant polarization; scanning electron microscopy; sol-gel processing; wet chemical method; Dielectric substrates; Ferroelectric films; Frequency; Niobium; Piezoelectric transducers; Platinum; Thick films; Ultrasonic imaging; Ultrasonic transducers; X-ray diffraction;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441779
