Title :
Optimization of film bulk acoustic wave resonator (FBAR) for RF filter applications
Author :
Yim, Munhyuk ; Kim, Dung-Hyun ; Chai, Dongkyu ; Jung, Junpil ; Park, Jinseuk ; Giwan Yoon
Author_Institution :
Information & Commun. Univ., Taejon, South Korea
Abstract :
In this paper, we present the effects of the thermal annealing of the W/SiO2 multi-layer Bragg reflectors on the resonance characteristics of the ZnO-based film bulk acoustic resonator (FBAR) devices and the use of the cobalt (Co) electrodes instead of the aluminum (Al) electrodes to optimize the FBAR for RF filter applications. The resonance characteristics could be significantly improved by the thermal annealing and using the Co as the electrodes in FBAR devices. The FBAR devices with the Bragg reflectors annealed at 400°C/30 min show excellent resonance characteristics in term of the return loss and Q-factor.
Keywords :
Q-factor; acoustic resonator filters; aluminium; bulk acoustic wave devices; cobalt; electrodes; optimisation; radiofrequency filters; rapid thermal annealing; silicon compounds; tungsten; zinc compounds; 30 min; 400 degC; Q-factor; RF filter; Si; ZnO-Al-SiO2-W-SiO2-W-SiO2-Si; ZnO-Co-SiO2-W-SiO2-W-SiO2-Si; aluminum electrodes; cobalt electrodes; film bulk acoustic wave resonator; multi-layer Bragg reflectors; optimization; return loss; thermal annealing; Acoustic waves; Aluminum; Annealing; Cobalt; Electrodes; Film bulk acoustic resonators; Optical films; Radio frequency; Resonance; Resonator filters;
Conference_Titel :
Radio and Wireless Conference, 2003. RAWCON '03. Proceedings
Print_ISBN :
0-7803-7829-6
DOI :
10.1109/RAWCON.2003.1227974
