Title :
Silicon plate penetration with a high energy laser pulse
Author :
Nishimura, A. ; Usami, Takashi ; Deki, K. ; Shimobeppu, Y. ; Hayasaka, Noboru ; Arisawa, T.
Author_Institution :
Adv. Photon Res. Center, Japan Atomic Energy Res. Inst., Kyoto, Japan
Abstract :
Laser processing on a silicon plate was observed. A free running flashlamp pumped Ti:sapphire laser was used. A pair of PIN detectors was useful for the detection of penetration. The photographs of keyhole were taken by laser microscopy.
Keywords :
cutting; laser beam machining; laser materials processing; p-i-n photodiodes; photodetectors; silicon; PIN detectors; Si; free running flashlamp pumped Ti:sapphire laser; high energy laser pulse; keyhole; laser microscopy; laser processing; penetration detection; photographs; silicon plate penetration; solid lasers; Crystalline materials; Detectors; Laser excitation; Laser tuning; Optical materials; Optical pulses; Pump lasers; Silicon; Surface emitting lasers; Thermal management;
Conference_Titel :
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location :
Chiba, Japan
Print_ISBN :
0-7803-6738-3
DOI :
10.1109/CLEOPR.2001.970941
