DocumentCode
2000068
Title
Silicon plate penetration with a high energy laser pulse
Author
Nishimura, A. ; Usami, Takashi ; Deki, K. ; Shimobeppu, Y. ; Hayasaka, Noboru ; Arisawa, T.
Author_Institution
Adv. Photon Res. Center, Japan Atomic Energy Res. Inst., Kyoto, Japan
Volume
2
fYear
2001
fDate
15-19 July 2001
Abstract
Laser processing on a silicon plate was observed. A free running flashlamp pumped Ti:sapphire laser was used. A pair of PIN detectors was useful for the detection of penetration. The photographs of keyhole were taken by laser microscopy.
Keywords
cutting; laser beam machining; laser materials processing; p-i-n photodiodes; photodetectors; silicon; PIN detectors; Si; free running flashlamp pumped Ti:sapphire laser; high energy laser pulse; keyhole; laser microscopy; laser processing; penetration detection; photographs; silicon plate penetration; solid lasers; Crystalline materials; Detectors; Laser excitation; Laser tuning; Optical materials; Optical pulses; Pump lasers; Silicon; Surface emitting lasers; Thermal management;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 2001. CLEO/Pacific Rim 2001. The 4th Pacific Rim Conference on
Conference_Location
Chiba, Japan
Print_ISBN
0-7803-6738-3
Type
conf
DOI
10.1109/CLEOPR.2001.970941
Filename
970941
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