DocumentCode :
2000294
Title :
Scanning Excimer Ablation System
Author :
Goodman, Douglas S. ; Ainsworth, Thomas ; Bobroff, Northman ; Chastang, Jean-Claude ; Doany, Fuad ; Fadi, Petra ; Lovas, Steve ; Myer, Richard ; Rand, Rick ; Rosenbluth, Alan E. ; Singh, Rama ; Surovic, Chris ; Wilczynski, Janusz S.
Author_Institution :
IBM Thomas J. Watson Research Center
fYear :
1992
fDate :
16-19 Nov 1992
Firstpage :
141
Lastpage :
142
Keywords :
Apertures; Electronics packaging; Focusing; Gas lasers; Laser ablation; Lenses; Lighting; Microscopy; Mirrors; Polyimides;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
LEOS '92, Conference Proceedings. IEEE Lasers and Electro-Optics Society, 1992 Annual Meeting
Print_ISBN :
0-7803-0526-4
Type :
conf
DOI :
10.1109/LEOS.1992.693883
Filename :
693883
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2000294
