Title :
Decoupling Control for a Magnetic Suspension Stage
Author :
Li, Qunming ; Wan, Liang ; Zhu, Ling ; Xu, Zhen
Author_Institution :
Central South Univ., Changsha
fDate :
May 30 2007-June 1 2007
Abstract :
A novel planar motion stage superposed with two magnetic suspension vehicles has been presented in this paper. The stage is a micro-electromechanical device which can widely be used in semiconductor manufacturing, printed circuit board processing, micro-assembling system, etc. The kinematics and dynamic models of the stage show that it is a highly coupled system. The decoupled control of the system is presented by utilizing the symmetry of the geometric configuration and space coordinates transformation techniques to eliminate the redundancy of electromagnetic force control. Then, each one of the five motion states becomes a SISO linear sub-system and the linear control theory can be used to design the feedback controller. Simulation results demonstrate that the proposed control scheme has better dynamic and static characteristics.
Keywords :
control system synthesis; electromagnetic forces; feedback; force control; linear systems; magnetic fluids; micromechanical devices; vehicles; SISO linear sub-system; decoupling control; electromagnetic force control; feedback controller; linear control theory; magnetic suspension; microassembling system; microelectromechanical device; planar motion stage; printed circuit board processing; semiconductor manufacturing; vehicles; Control systems; Force control; Kinematics; Magnetic levitation; Manufacturing processes; Microelectromechanical devices; Printed circuits; Semiconductor device manufacture; Vehicle dynamics; Vehicles; coordinates transformation; decoupling control; magnetic suspension stage;
Conference_Titel :
Control and Automation, 2007. ICCA 2007. IEEE International Conference on
Conference_Location :
Guangzhou
Print_ISBN :
978-1-4244-0818-4
Electronic_ISBN :
978-1-4244-0818-4
DOI :
10.1109/ICCA.2007.4376372
