High-frequency micromachined ultrasonic annular arrays

Author

Wu, D.W. ; Liu, C.G. ; Zhou, Q.F. ; Shung, K.K. ; Djuth, F.T.

Author_Institution

Dept. of Biomed. Eng., USC, Los Angeles, CA, USA

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2201

Lastpage

2204

Abstract

This paper presents the development of high-frequency ultrasonic annular arrays. A high-frequency six-ring annular array was successfully fabricated with the DRIE dry-etching. The array has a total aperture of 1.3 mm and six equal area (0.25 mm² ) rings separated by 16-Â¿m kerfs. The simulations prove its capability of dynamic focusing and its improved lateral resolution. The measured results of the array shows a center frequency of 105 MHz, a bandwidth (-6 dB) of 40% and an insertion loss of -20 dB at the center frequency.

Keywords

etching; micromachining; piezoelectric transducers; ultrasonic focusing; ultrasonic transducer arrays; DRIE dry etching; bandwidth; center frequency; dynamic focusing; frequency 105 MHz; high-frequency micromachined ultrasonic annular arrays; insertion loss; Apertures; Dry etching; Fabrication; Focusing; Frequency; Phased arrays; Plasma applications; Plasma chemistry; Ultrasonic transducer arrays; Ultrasonic transducers; High-frequency; Micromachined; PZT film; annular array;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441826

Filename

5441826