Segment-structured Diamond-like carbon films installed on driving surface of surface acoustic wave linear motor

A surface acoustic wave (SAW) linear motor is a kind of ultrasonic motor, which has many merits such as thin structure, easy installation and so on. The motor, however, has a problem with wear of contact surface due to its driving principle. Diamond-like carbon (DLC) film have been recognized as a wear-resistant material. In this research, segment-structured DLC (S-DLC) films have been applied to the stator transducer surface. However, exfoliations of the S-DLC films and insufficient driving performance were observed. This paper proposes a new preparing method for the segment structure on the stator transducer and describes the prepared surface. Driving surface abrasion test result is also reported. Maximum coefficient of static friction of the proposed motor is compared with that of a conventional motor. Driving characteristics observation result is also included.