Design and evaluation of low-profile micro ultrasonic motors driven by sector shaped piezoelectric vibrators

Author

Kanda, Takefumi ; Ichihara, Takashi ; Suzumori, Koichi

Author_Institution

Grad. Sch. of Natural Sci. & Technol., Okayama Univ., Okayama, Japan

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

2596

Lastpage

2599

Abstract

In order to miniaturize micro mechatronics systems and portable devices, there are increasing needs for low-profile and high power micro actuators. The aim of this paper is to improve the transducer of low-profile micro ultrasonic motors. This motor has two sector-shaped vibrators and the pre-load mechanism. In this research, the pre-load mechanism was redesigned by the finite element method and the beam width of the pre-load mechanism was changed partly. The pre-load systems that used a new pre-load mechanism design were fabricated and evaluated.

Keywords

finite element analysis; microactuators; piezoelectric actuators; piezoelectric transducers; ultrasonic motors; ultrasonic transducers; finite element method; high power microactuators; low profile microactuators; low profile microultrasonic motors; micromechatronic systems; microultrasonic motor transducer; portable devices; preload mechanism; sector shaped piezoelectric vibrators; Actuators; Electrodes; Finite element methods; Laser beam cutting; Mechatronics; Microactuators; Micromotors; Prototypes; Rotors; Steel; Finite Element Method; Low-profile; Micro Motor; Pre-load Mechanism; Ultrasonic Motor;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441846

Filename

5441846