Design and evaluation of low-profile micro ultrasonic motors driven by sector shaped piezoelectric vibrators

In order to miniaturize micro mechatronics systems and portable devices, there are increasing needs for low-profile and high power micro actuators. The aim of this paper is to improve the transducer of low-profile micro ultrasonic motors. This motor has two sector-shaped vibrators and the pre-load mechanism. In this research, the pre-load mechanism was redesigned by the finite element method and the beam width of the pre-load mechanism was changed partly. The pre-load systems that used a new pre-load mechanism design were fabricated and evaluated.