Title :
(yxl)21.82° LiNbO3 pseudo-LFE acoustic wave sensors
Author :
Ma, Tingfeng ; Zhang, Zhitian ; Wang, Wenyan ; Zhang, Chao ; Feng, Guanping
Author_Institution :
Dept. of Precision Instrum. & Mechanology, Tsinghua Univ., Beijing, China
Abstract :
Previous studies showed that Lateral field excitation (LFE) devices on AT-cut quartz are sensitive to liquid electrical property changes. However, the sensitivity of the device is limited due to the low piezoelectric coupling factor. In the present study, a pseudo-LFE sensor on (yxl)21.82° lithium niobate is investigated both theoretically and experimentally. It is found that the (yxl)21.82° LiNbO3 LFE device works on pseudo-LFE mode with a very high piezoelectric coupling factor of 24.41%, which is almost 3 times higher than that of AT-cut quartz. The experimental result also shows that the device is about 20 times more sensitive to liquid conductivity changes compared to AT-cut quartz LFE devices.
Keywords :
bulk acoustic wave devices; lithium compounds; piezoelectric devices; sensitivity; AT-cut quartz; LiNbO3 pseudo-LFE acoustic wave sensor; LiNbO3; bulk acoustic wave devices; device sensitivity; lateral field excitation devices; liquid electrical property change; lithium niobate; piezoelectric coupling factor; Acoustic sensors; Acoustic waves; Coupling circuits; Electrodes; Lithium niobate; Mechanical factors; Mechanical sensors; Piezoelectric devices; Resonance; Resonant frequency; acoustic wave sensor; lithium niobate; pseudo-lateral field excitation;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441874
