SAW reflection from surface inhomogeneities of isotropic and anisotropic substrates

Author

Darinskii, Alexander ; Weihnacht, Manfred ; Schmidt, Hagen

Author_Institution

Inst. of Crystallogr., RAS, Moscow, Russia

fYear

2009

fDate

20-23 Sept. 2009

Firstpage

1

Lastpage

4

Abstract

The reflection of SAW from single steps as well as single and multiple grooves, projections, and strips on half-infinite isotropic (fused quartz) and piezoelectric (LiNbO₃) substrates is investigated by FEM. A perfectly matched layer (PML) is used in order to truncate the computational domain. The amplitude of the reflected SAW is found by applying FFT to the scattered field on the surface of the substrate.

Keywords

acoustic wave reflection; fast Fourier transforms; finite element analysis; lithium compounds; piezoelectric materials; quartz; substrates; surface acoustic waves; surface structure; SAW reflection; anisotropic substrates; fast Fourier transform; finite element method; fused quartz substrates; halfinfinite isotropic; isotropic substrates; multiple grooves; perfectly matched layer; piezoelectric substrates; projections; single groove; strips; surface inhomogeneities; Anisotropic magnetoresistance; Boundary conditions; Dielectric substrates; Electrodes; Equations; Gratings; Reflection; Scattering; Strips; Surface acoustic waves;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium (IUS), 2009 IEEE International

Conference_Location

Rome

ISSN

1948-5719

Print_ISBN

978-1-4244-4389-5

Electronic_ISBN

1948-5719

Type

conf

DOI

10.1109/ULTSYM.2009.5441957

Filename

5441957