Title :
SAW reflection from surface inhomogeneities of isotropic and anisotropic substrates
Author :
Darinskii, Alexander ; Weihnacht, Manfred ; Schmidt, Hagen
Author_Institution :
Inst. of Crystallogr., RAS, Moscow, Russia
Abstract :
The reflection of SAW from single steps as well as single and multiple grooves, projections, and strips on half-infinite isotropic (fused quartz) and piezoelectric (LiNbO3) substrates is investigated by FEM. A perfectly matched layer (PML) is used in order to truncate the computational domain. The amplitude of the reflected SAW is found by applying FFT to the scattered field on the surface of the substrate.
Keywords :
acoustic wave reflection; fast Fourier transforms; finite element analysis; lithium compounds; piezoelectric materials; quartz; substrates; surface acoustic waves; surface structure; SAW reflection; anisotropic substrates; fast Fourier transform; finite element method; fused quartz substrates; halfinfinite isotropic; isotropic substrates; multiple grooves; perfectly matched layer; piezoelectric substrates; projections; single groove; strips; surface inhomogeneities; Anisotropic magnetoresistance; Boundary conditions; Dielectric substrates; Electrodes; Equations; Gratings; Reflection; Scattering; Strips; Surface acoustic waves;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441957
