Functional characterisation of high frequency arrays based on micro-moulded 1–3 piezocomposites

A clinical need exists for high frequency ultrasound arrays that can provide improved image quality compared to the single-element transducers currently used in real-time high resolution imaging systems. Miniature arrays based on fine-scale piezocomposites are required for sufficiently sensitive imaging systems. In this paper we report fabrication and functional characterization of prototype linear arrays suitable for high frequency imaging. Array electrodes have been patterned photolithographically on the surface of micro-moulded 1–3 piezocomposites with processes than can be scaled for linear arrays operating at 100 MHz. Functional testing of arrays with 50 µm and 15 µm pitch demonstrates feasibility of this approach.