Title :
Self-temperature-compensation characteristics at 1st- and 3rd-harmonic frequencies for SAW gas sensor used in sensor network
Author :
Hikita, M. ; Kato, Y. ; Matsuda, J. ; Watanabe, T. ; Nakano, A.
Author_Institution :
Kogakuin Univ., Tokyo, Japan
Abstract :
A novel SAW gas sensor with self-temperature-compensated characteristics has been proposed for use in sensor network. Any kinds of piezoelectric crystal substrates irrelevant to their temperature coefficients of SAW velocities can be adopted in this gas sensor. The sensing dynamic range can be extended by utilizing both the 1st- and 3rd-harmonic frequency signals. Experimental results at the 75-MHz 1st-fundamental frequency and the 225-MHz 3rd-harmonic frequency showed validity of the proposed sensor structure.
Keywords :
gas sensors; harmonic generation; piezoelectric materials; surface acoustic wave sensors; 1st-harmonic frequency signal; 3rd-harmonic frequency signal; SAW gas sensor; SAW velocities; frequency 225 MHz; frequency 75 MHz; piezoelectric crystal substrates; self-temperature compensation characteristics; sensor network; surface acoustic wave gas sensor; Circuits; Dynamic range; Frequency; Gas detectors; Sensor phenomena and characterization; Sensor systems; Surface acoustic waves; Temperature sensors; Voltage-controlled oscillators; ZigBee; SAW; SAW gas sensor; SAW sensor; ZigBee; sensor network;
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
DOI :
10.1109/ULTSYM.2009.5441984
