Title :
Dynamic properties of individual carbon nanotube emitters for maskless lithography
Author :
Ribaya, Bryan P. ; Niemann, Darrell L. ; Makarewicz, Joseph ; Gunther, Norman G. ; Nguyen, Cattien V. ; Rahman, Mahmud
Author_Institution :
Electron Devices Lab., Santa Clara Univ., Santa Clara, CA
Abstract :
In this paper, we present an empirical study of dynamic behavior of an electron source system which incorporates an individual CNT. We propose a representative circuit model that is simple yet particularly valuable for emission current control for each CNT emitter in an array to facilitate high throughput maskless lithography.
Keywords :
carbon nanotubes; electron sources; lithography; carbon nanotube emitters; dynamic properties; electron source; maskless lithography; representative circuit; Carbon nanotubes; Cathodes; Circuits; Diodes; Electron beams; Electron sources; Lithography; Resistors; Scanning electron microscopy; Voltage; carbon nanotube; dynamic properties; emitter array; field emission; maskless lithography; voltage-controlled variable resistor;
Conference_Titel :
Vacuum Electronics Conference, 2008. IVEC 2008. IEEE International
Conference_Location :
Monterey, CA
Print_ISBN :
978-1-4244-1715-5
DOI :
10.1109/IVELEC.2008.4556392
