DocumentCode :
20053
Title :
Exploring Well-Configurations for Minimizing Single Event Latchup
Author :
Uemura, Toshifumi ; Kato, Toshihiko ; Tanabe, Ryo ; Iwata, Hiroshi ; Ariyoshi, Junichi ; Matsuyama, Hiroki ; Hashimoto, Mime
Author_Institution :
Fujitsu Semicond. Ltd., Tokyo, Japan
Volume :
61
Issue :
6
fYear :
2014
fDate :
Dec. 2014
Firstpage :
3282
Lastpage :
3289
Abstract :
This work experimentally studies single event latchup (SEL) prevention by altering well configurations. The well structures under consideration in this paper are ordinary twin-well structure, triple-well structure with deep N-well (DNW) and triple-well structure with deep P-well (DPW). Doping profiles are also varied in our experiments. Neutron irradiation tests for test chips fabricated in 55-nm and 90-nm bulk Si CMOS processes show that SEL can be suppressed with a DPW or a DNW well configuration and a high-dose implantation in the well. Among these, DPW was the most effective to eliminate SEL, and no SEL was observed throughout our irradiation tests in the SRAM with DPW in both 55-nm and 90-nm processes. In addition, DPW brings a desirable side effect of single event upset (SEU) reduction. A disadvantage is a cost to develop a DPW process. DNW is a common process option and hence it is easily adopted for SEL prevention, but we need to pay attention to the fact that DNW increases SEU rate. Increasing well doping in twin-well structure reduced SEL by 60%.
Keywords :
CMOS integrated circuits; SRAM chips; doping profiles; elemental semiconductors; radiation hardening (electronics); semiconductor device testing; silicon; CMOS processes; DNW; DPW; SEL; SEU reduction; SRAM; Si; deep N-well; deep P-well; doping profiles; high-dose implantation; neutron irradiation tests; single event latchup; single event upset reduction; size 55 nm; size 90 nm; test chips; triple-well structure; twin-well structure; well configurations; Bipolar transistors; CMOS integrated circuits; Doping; Neutrons; Radiation effects; SRAM cells; Single event upsets; Alpha; SRAM; neutron; parasitic bipolar action; single event latchup; soft-error; terrestrial environment;
fLanguage :
English
Journal_Title :
Nuclear Science, IEEE Transactions on
Publisher :
ieee
ISSN :
0018-9499
Type :
jour
DOI :
10.1109/TNS.2014.2363666
Filename :
6940339
Link To Document :
بازگشت