DocumentCode :
2005321
Title :
Temperature compensated solidly mounted resonators with thin SiO2 layers
Author :
Allah, Mohamed Abd ; Kaitila, Jyrki ; Thalhammer, Robert ; Weber, Werner ; Schmitt-Landsiedel, Doris
Author_Institution :
Lehrstuhl fur Tech. Elektron., Tech. Univ. Munchen, Munich, Germany
fYear :
2009
fDate :
20-23 Sept. 2009
Firstpage :
859
Lastpage :
862
Abstract :
Temperature compensation is becoming more and more a high demand for RF filters in order to successfully meet the tightening specifications over a wide range of temperatures. We show our results on temperature compensation by adding thin SiO2 layers at high stress regions inside the resonator. We examine the effect of adding the SiO2 layer on the resonators properties and we extract an accurate value to the temperature coefficient of stiffness of thin film SiO2.
Keywords :
acoustic resonator filters; bulk acoustic wave devices; compensation; elasticity; silicon compounds; RF filters; SiO2; high stress region; temperature coefficient; temperature compensated solidly mounted resonators; thin SiO2 layers; thin film SiO2 stiffness; Acoustic devices; Acoustic waves; Bandwidth; Mirrors; Resonance; Resonant frequency; Resonator filters; Stress; Temperature dependence; Temperature distribution;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium (IUS), 2009 IEEE International
Conference_Location :
Rome
ISSN :
1948-5719
Print_ISBN :
978-1-4244-4389-5
Electronic_ISBN :
1948-5719
Type :
conf
DOI :
10.1109/ULTSYM.2009.5442034
Filename :
5442034
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2005321
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