Design of new lateral field excitation langasite resonant sensors

This paper reports on the lateral field excitation of micromachined langasite resonant beams. In a first part, an analytical modelisation is used to determine orientations of the structures that give satisfactory metrological performances. Results among commercial cuts (X, Y and Z cuts) are discussed. In the second part the simulator TENSOSIM which is elaborated to furnish etching shapes for 2D and 3D micromechanical structures is used to derive sectional shapes of beams. Finally, piezoelectric considerations and etching shapes simulations are examined together in order to obtain a selection of satisfactory orientations of beams for sensors applications.