Title :
A unified substrate current model for weak and strong impact ionization in sub-0.25 /spl mu/m NMOS devices
Author :
Ramaswamy, S. ; Amerasekera, A. ; Chang, M.-C.
Author_Institution :
Semicond. Process & Device Center, Texas Instrum. Inc., Dallas, TX, USA
Abstract :
We have developed a new unified substrate current model for weak and strong impact-ionization. The model which is semi-empirical is able to capture non-local field effects. The importance of this model is its simplicity requiring three parameters which can be extracted easily from a single wafer-level measurement. The implementation of this model in a circuit simulator provides the capability to include hot-carrier and ESD effects into circuit design optimization, which is essential for achieving design-in-reliability targets.
Keywords :
MOSFET; circuit analysis computing; electric current; electrostatic discharge; hot carriers; impact ionisation; semiconductor device models; 0.25 micron; ESD effects; NMOS devices; circuit design optimization; circuit simulator; hot-carrier effects; nonlocal field effects; semiempirical model; strong impact ionization; submicron devices; unified substrate current model; weak impact ionization; Circuit simulation; Electrostatic discharge; Hot carriers; Impact ionization; MOS devices; MOSFETs; Semiconductor device modeling; Semiconductor process modeling; Substrates; Voltage;
Conference_Titel :
Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-4100-7
DOI :
10.1109/IEDM.1997.650523