Integrated finite element analysis of an electrostatically—driven vibrating beam used as a gyrosensor

This paper builds the finite element analysis of a flexural vibrating beam driven by electrostatic force and submitted to a prescribed gyration along its own axis. A basic algebraic system describes the gyroscopic couplings in agreement with known analytical models. Then, a Taylor´s expansion of the gap between the beam and the substrate is performed to take into account the beam-softening created by the DC part of the electrostatic pressure. Thus we get a simple integrated numerical model of the basic sensing element of vibrating-beam gyro-MEMS.