Abstract :
The following topics are dealt with: microsystems; anticorrosion coating; scanning electrochemical microscopy; software-defined microstrip antenna; large vertical displacement zipper microactuator; traveling wave annular ultrasonic micromotor; graphene-based nanoribbons; thermochemical nanolithography; microfluidic synthesis; microfabricated fluidic channel; atomic force microscopy; PZT actuator; MEMS sensor; low-frequency vibration energy harvesting; implantable blood pressure monitoring cuff; capsule endoscopy device design; thin-film piezoelectric traveling wave ultrasonic rotary motor; VAPoR time-of-flight mass spectrometer; 3D nanoporous optofluidic device; high sensitivity SERS detection; measurement; and instrumentation.
Keywords :
electric actuators; endoscopes; energy harvesting; microfabrication; micromechanical devices; microstrip antennas; nanolithography; nanoribbons; scanning probe microscopy; surface enhanced Raman scattering; time of flight mass spectrometers; ultrasonic motors; 3D nanoporous optofluidic device; MEMS sensor; PZT actuator; VAPoR time-of-flight mass spectrometer; anticorrosion coating; atomic force microscopy; capsule endoscopy device design; graphene-based nanoribbons; high sensitivity SERS detection; implantable blood pressure monitoring cuff; instrumentation; large vertical displacement zipper microactuator; low-frequency vibration energy harvesting; measurement; microfabricated fluidic channel; microfluidic synthesis; microsystems; scanning electrochemical microscopy; software-defined microstrip antenna; thermochemical nanolithography; thin-film piezoelectric traveling wave ultrasonic rotary motor; traveling wave annular ultrasonic micromotor;
Conference_Titel :
Microsystems for Measurement and Instrumentation (MAMNA), 2012
Conference_Location :
Annapolis, MD
Print_ISBN :
978-1-4673-1781-8
DOI :
10.1109/MAMNA.2012.6195090
