Integrated cavity optomechanical sensors for atomic force microscopy

Author

Liu, Yuxiang ; Miao, Houxun ; Aksyuk, Vladimir ; Srinivasan, Kartik

Author_Institution

Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA

fYear

2012

fDate

27-27 March 2012

Firstpage

1

Lastpage

3

Abstract

We present the development of cavity optomechanical sensors that integrate nanoscale cantilevers for mechanical transduction with optical resonators used for motional readout. The cantilever stiffness was varied over 4 orders of magnitude (from ≈0.01 N/m to ≈290 N/m) by simply modifications to the device geometry. The observed displacement sensitivity (fm/(Hz)^(1/2)), near-field readout scheme, and integrated nature suggest that the sensors are promising for use in stable, high-bandwidth AFM applications.

Keywords

atomic force microscopy; cantilevers; elasticity; laser cavity resonators; nanosensors; optical resonators; optical sensors; atomic force microscopy; device geometry; displacement sensitivity; integrated cavity optomechanical sensor; mechanical transduction; motional readout; nanoscale cantilever stiffness; near-field readout scheme; optical resonator; stable high-bandwidth AFM application; Optical device fabrication; Optical fiber sensors; Optical fibers; Optical imaging; Optical resonators; Atomic force microscopy; Laser cavity resonators; Nanoelectromechanical systems; Nanophotonics; Optoelectronics and photonic sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Conference_Location

Annapolis, MD

Print_ISBN

978-1-4673-1781-8

Type

conf

DOI

10.1109/MAMNA.2012.6195096

Filename

6195096