Title :
Integrated cavity optomechanical sensors for atomic force microscopy
Author :
Liu, Yuxiang ; Miao, Houxun ; Aksyuk, Vladimir ; Srinivasan, Kartik
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We present the development of cavity optomechanical sensors that integrate nanoscale cantilevers for mechanical transduction with optical resonators used for motional readout. The cantilever stiffness was varied over 4 orders of magnitude (from ≈0.01 N/m to ≈290 N/m) by simply modifications to the device geometry. The observed displacement sensitivity (fm/(Hz)^(1/2)), near-field readout scheme, and integrated nature suggest that the sensors are promising for use in stable, high-bandwidth AFM applications.
Keywords :
atomic force microscopy; cantilevers; elasticity; laser cavity resonators; nanosensors; optical resonators; optical sensors; atomic force microscopy; device geometry; displacement sensitivity; integrated cavity optomechanical sensor; mechanical transduction; motional readout; nanoscale cantilever stiffness; near-field readout scheme; optical resonator; stable high-bandwidth AFM application; Optical device fabrication; Optical fiber sensors; Optical fibers; Optical imaging; Optical resonators; Atomic force microscopy; Laser cavity resonators; Nanoelectromechanical systems; Nanophotonics; Optoelectronics and photonic sensors;
Conference_Titel :
Microsystems for Measurement and Instrumentation (MAMNA), 2012
Conference_Location :
Annapolis, MD
Print_ISBN :
978-1-4673-1781-8
DOI :
10.1109/MAMNA.2012.6195096
