Title :
Novel fabrication process for transverse and longitudinal mode PZT actuators
Author :
Misri, Isaac ; Hareesh, Prakruthi ; Yang, Shuang ; DeVoe, Don L.
Author_Institution :
Mech. Eng., Univ. of Maryland, College Park, MD, USA
Abstract :
Bulk PZT sheets are patterned using micro powder blasting and a dry film photoresist to fabricate functional piezoelectric actuators. Etch characterization of bulk PZT is reported for improved powder blasting parameters. Using this information, PZT actuators are successfully fabricated and tested. The developed method described offers great potential for future bulk PZT transducers, as it provides relatively high resolutions, a reduced etch time, and simple implementation.
Keywords :
etching; lead compounds; microfabrication; photoresists; piezoelectric actuators; piezoelectric transducers; powder technology; PZT; bulk PZT sheets; bulk PZT transducers; dry film photoresist; etch time; functional piezoelectric actuator fabrication; longitudinal mode PZT actuators; micro powder blasting; powder blasting parameters; transverse mode PZT actuators; Actuators; Anisotropic magnetoresistance; Etching; Films; Powders; Resists; Substrates; Fabrication; Piezoelectric Actuators;
Conference_Titel :
Microsystems for Measurement and Instrumentation (MAMNA), 2012
Conference_Location :
Annapolis, MD
Print_ISBN :
978-1-4673-1781-8
DOI :
10.1109/MAMNA.2012.6195097
