• DocumentCode
    2006262
  • Title

    Micromachined accelerometer with no proof mass

  • Author

    Leung, A.M. ; Jones, J. ; Czyzewska, E. ; Chen, J. ; Pascal, M.

  • Author_Institution
    Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC, Canada
  • fYear
    1997
  • fDate
    10-10 Dec. 1997
  • Firstpage
    899
  • Lastpage
    902
  • Abstract
    This paper describes a revolutionary micromachined accelerometer which is simple, reliable, and inexpensive to make. The operating principle of this accelerometer is based on free-convection heat transfer of a tiny hot air bubble in an enclosed chamber. An experimental device has demonstrated a 0.6 milli-g sensitivity which can theoretically be extended to sub-micro-g level.
  • Keywords
    accelerometers; micromachining; microsensors; natural convection; air bubble; free-convection heat transfer; micromachined accelerometer; proof mass; Acceleration; Accelerometers; Bonding; Bridges; Etching; Gold; Nickel; Silicon; Temperature measurement; Temperature sensors;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International
  • Conference_Location
    Washington, DC, USA
  • ISSN
    0163-1918
  • Print_ISBN
    0-7803-4100-7
  • Type

    conf

  • DOI
    10.1109/IEDM.1997.650526
  • Filename
    650526
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2006262