Title :
Micromachined accelerometer with no proof mass
Author :
Leung, A.M. ; Jones, J. ; Czyzewska, E. ; Chen, J. ; Pascal, M.
Author_Institution :
Sch. of Eng. Sci., Simon Fraser Univ., Burnaby, BC, Canada
Abstract :
This paper describes a revolutionary micromachined accelerometer which is simple, reliable, and inexpensive to make. The operating principle of this accelerometer is based on free-convection heat transfer of a tiny hot air bubble in an enclosed chamber. An experimental device has demonstrated a 0.6 milli-g sensitivity which can theoretically be extended to sub-micro-g level.
Keywords :
accelerometers; micromachining; microsensors; natural convection; air bubble; free-convection heat transfer; micromachined accelerometer; proof mass; Acceleration; Accelerometers; Bonding; Bridges; Etching; Gold; Nickel; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Electron Devices Meeting, 1997. IEDM '97. Technical Digest., International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-4100-7
DOI :
10.1109/IEDM.1997.650526
