Thin-film piezoelectric traveling wave ultrasonic rotary motor

Author

Rudy, Ryan Q. ; DeVoe, Don L. ; Smith, Gabriel L. ; Polcawich, Ronald G.

Author_Institution

Univ. of Maryland: Mech. Eng., College Park, MD, USA

fYear

2012

fDate

27-27 March 2012

Firstpage

1

Lastpage

4

Abstract

The authors report demonstrated bi-directional rotary motion of a millimeter scale traveling wave ultrasonic motor (TWUM) using thin film lead zirconate titanate (PZT). Rotation speeds of up to 2300 RPM have been achieved at 10 V and less than 10 mW. Design, fabrication, and initial testing of the TWUM are described. The low-power, high-torque, zero-power off state rotary motors described here, could enable numerous applications in the fields of small-scale robotics, fuzing, and biomedical technology.

Keywords

thin film devices; ultrasonic motors; bidirectional rotary motion; biomedical technology; high-torque rotary motors; low-power rotary motors; millimeter scale TWUM; millimeter scale traveling wave ultrasonic motor; small-scale robotics; thin film lead zirconate titanate; thin-film piezoelectric traveling wave ultrasonic rotary motor; voltage 10 V; zero-power off state rotary motors; Acoustics; Electrodes; Fabrication; Rotors; Silicon; Stators; Torque; motor; piezoelectric; traveling wave; ultrasonic;

fLanguage

English

Publisher

ieee

Conference_Titel

Microsystems for Measurement and Instrumentation (MAMNA), 2012

Conference_Location

Annapolis, MD

Print_ISBN

978-1-4673-1781-8

Type

conf

DOI

10.1109/MAMNA.2012.6195103

Filename

6195103