Title :
MEMS resonators in health monitoring prognostics
Author :
Lee, Joshua E -Y
Author_Institution :
Dept. of Electron. Eng., City Univ. of Hong Kong, Hong Kong, China
Abstract :
The idea of employing microelectromechanical systems (MEMS) technology in PHM is no longer a foreign or novel one. This paper focuses on a particular class of MEMS devices known as micromechanical (MEMS) resonators and their application to PHM. This paper illustrates how MEMS resonators can by implemented as building blocks of devices and systems with various functions of potentially great benefit to the field of PHM. In particular, two applications of MEMS resonators that could be potentially of great interest to PHM have been selected to be highlighted herein. These are namely strain sensing (especially usefully for structural health monitoring) and acoustic spectral processing for low power real-time degradation monitoring.
Keywords :
condition monitoring; micromechanical resonators; microsensors; strain sensors; MEMS devices; MEMS resonators; PHM; acoustic spectral processing; health monitoring prognostics; low power real-time degradation monitoring; strain sensing; structural health monitoring; Micromechanical devices; Microphones; Mixers; Prognostics and health management; Strain; Substrates; Microresonators; health monitoring; micromechanical sensors; spectral processors;
Conference_Titel :
Prognostics and System Health Management Conference (PHM-Shenzhen), 2011
Conference_Location :
Shenzhen
Print_ISBN :
978-1-4244-7951-1
Electronic_ISBN :
978-1-4244-7949-8
DOI :
10.1109/PHM.2011.5939554
